Sr. Mechanical Engineering Manager — Vacuum Systems

To make electronics, you need chips, wafers, transistors, reticles, and... To make these, you must see, test and manufacture them at scale—faster and better than ever before. That's where KLA comes in. Whether you're early in your career or an experienced professional, you'll solve complex challenges, work alongside brilliant minds and help shape the future of technology.

Group/Division The Semiconductor Products and Customers (Semi PC) business unit designs, builds and sells KLA’s product portfolio to help chip manufacturers meet high-quality standards for technologies like AI, data centers, automotive and electronic devices. Our inspection, metrology, and analytics systems detect and monitor defects across logic and memory chips, specialty semiconductors, wafers, reticles, advanced packaging, process equipment and materials. We also develop technologies for specialty processes, IC substrates, and PCB manufacturing, including etch and deposition, component inspection, and imaging and analytics. The RAPID division leads the industry in reticle inspection solutions, helping ensure high lithography yields and cost-effective semiconductor manufacturing. Its systems support both mask shops and fabs by detecting defects early in the process, enabling faster, more reliable production.

What You'll Do In this role, you will play a key part in advancing business priorities by delivering high-impact work across your area of expertise.

Job Description The Advanced Technology of RAPID Division is seeking a Senior Mechanical Engineering Manager to lead mechanical development for next-generation EUV light source in the cutting-edge reticle inspection products. This role leads a multidisciplinary mechanical team delivering precision hardware operating in extreme environments including high vacuum, high-power laser, thermal transients, precision opto-mechanics, and precision motion mechanisms.

Responsibilities

• Lead and develop a high-performing mechanical engineering team; set technical direction, priorities, and execution plans to deliver on schedule, cost, and quality.

• Own mechanical system architecture and delivery for EUV source subsystems including: vacuum chambers and ultra-clean/UHV-compatible hardware; laser/mechanical integration and beam delivery mechanical packaging; collector mirror mounting/alignment mechanisms; plasma target delivery hardware; precision motion components; gas delivery mechanical interfaces; thermal management and structural dynamics.

• Drive rigorous design review and release discipline, including requirements definition, tolerance analysis, validation/qualification planning, and documentation quality.

• Partner closely with Technology, Optics, Systems, Production Development, Machine Controls, Manufacturing and Service organizations to improve cost, performance, manufacturability, reliability, and serviceability.

• Lead root-cause analysis and corrective actions for complex subsystem issues; implement design improvements that increase availability and uptime.

• Manage supplier technical engagement for precision parts and subassemblies, including vendor selection, qualification, and issue resolution.

• Embed safety-by-design into mechanical solutions and enable people/machine safety service/production tooling (jigs, fixtures, alignment tools, handling/lifting concepts).

• Occasional domestic/international travels may be required to support build/validation and customer-site readiness.

Preferred Qualifications

• Experience with EUV-adjacent source or illumination subsystems, high-power laser-integrated hardware, or precision opto-mechanical alignment systems.

• Experience with cryogenic mechanisms and vacuum feedthroughs/seals designed for reliability and maintainability.

• Track record of production transfer and sustaining engineering support (tooling, procedures, and field escalation readiness).

Minimum Qualifications

• B.S. in Mechanical Engineering (M.S. preferred) or equivalent related discipline.

• 10+ years of experience developing complex hardware/capital equipment (semiconductor tools, precision vacuum systems, opto-mechanical equipment, aerospace-grade mechanisms, or similar).

• 5+ years of people management experience leading engineers through concept-to-release development.

• Demonstrated expertise in multiple of: vacuum/UHV design, precision mechanisms, rotating machinery/air bearings, thermal-structural design, vibration/dynamics, contamination-aware mechanical design, and design-for-manufacturability/serviceability.

• Strong cross-functional communication and leadership skills; ability to drive alignment across technical stakeholders and suppliers.

About KLA We provide advanced inspection tools, metrology systems, process solutions, and computational analytics that make electronics possible, tackling complex challenges. From electron and photon optics to machine learning and data analytics, we seek perfection at the most fundamental level of matter in the universe. If you want to make electronics that push industries forward and make the world a better place, join us.

Total Rewards Base Pay Range: $181,000.00 - $265,467.00 Annually Primary Location: USA-CA-Milpitas-KLA

KLA’s total rewards package for employees may also include participation in performance incentive programs and eligibility for additional benefits including but not limited to: medical, dental, vision, life, and other voluntary benefits, 401(K) including company matching, employee stock purchase program (ESPP), student debt assistance, tuition reimbursement program, development and career growth opportunities and programs, financial planning benefits, wellness benefits including an employee assistance program (EAP), paid time off and paid company holidays, and family care and bonding leave.

Interns are eligible for some of the benefits listed. Our pay ranges are determined by role, level, and location. The range displayed reflects the pay for this position in the primary location identified in this posting. Actual pay depends on several factors, including state minimum pay wage rates, location, job-related skills, experience, and relevant education level or training. We are committed to complying with all applicable federal and state minimum wage requirements where applicable. If applicable, your recruiter can share more about the specific pay range for your preferred location during the hiring process.

Use of AI Statement At KLA, our interviews seek to understand your individual skills, problem-solving approach and authentic thinking. To ensure a fair and consistent evaluation, the use of AI, recording tools or other technologies to generate, suggest or provide responses during interviews—whether virtual or in person—is not permitted unless explicitly approved in advance as part of a reasonable accommodation or invited by the interviewer. Use of these tools may interfere with our ability to evaluate your individual qualifications and affect your candidacy. KLA is committed to advancing innovation through responsible AI, and we value candidates who share this mindset.

Equal Opportunity Statement KLA is proud to be an Equal Opportunity Employer. We will ensure that qualified individuals with disabilities are provided reasonable accommodation to participate in the job application or interview process, to perform essential job functions, and to receive other benefits and privileges of employment. Please contact us at [email protected] or at +1-408-352-2808 to request accommodation.

For additional information, view the US Know Your Rights poster on the U.S. Equal Employment Opportunity Commission website.