Equipment Engineer, Photo and Ebeam Lithography Development, Microelectronics Research Center

Tool Performance, Reliability, and SustainmentMaintain and optimize the performance of photolithography and electron-beam lithography equipment to meet facility capability and uptime targets.Troubleshoot process deviations and tool-related issues using structured root cause analysis.Monitor key tool performance metrics, including exposure stability, overlay accuracy, focus control, beam current stability, and stage performance.Perform routine performance verification, tool matching, and calibration to ensure consistent and repeatable operation.Perform diagnostic testing and hardware troubleshooting in coordination with maintenance staff and vendors.Support tool qualification, calibration, acceptance testing, and preventive maintenance activities.Diagnostics, Troubleshooting, and Repair Diagnose and resolve equipment-related issues impacting lithography performance using systematic troubleshooting and root cause analysis.Perform diagnostic testing and hands-on hardware troubleshooting, including replacement of boards, sensors, stages, vacuum components, and mechanical assemblies.Support preventive maintenance planning and execution to minimize downtime and performance drift.Process Development and Optimization Assist users to develop, optimize, and document photolithography and electron-beam lithography processes for a wide range of device structures and materials as needed.Assist users in designing and executing experiments to push tool and process limits in resolution, contrast, sidewall quality, and pattern fidelity.Assist users to address proximity effects, resist behavior, exposure strategies, and process bias through systematic experimentation and modeling.Metrology and Data Integration Utilize lithography-related metrology (e.g., optical inspection, SEM, AFM, overlay and CD measurements) to validate tool performance ensure precise linewidth control and overlay accuracy.Correlate metrology results with tool settings and hardware condition to identify performance trends and degradation.Support tool acceptance testing, requalification after maintenance, and periodic performance audits.Analyze lithography and metrology data to support process control and reproducibility.Correlate lithographic results with downstream etch or deposition outcomes to optimize pattern transfer.User Support, Training, and Documentation Develop and maintain equipment-related documentation, including operating procedures, maintenance records, calibration logs, and performance baselines.Ensure compliance with cleanroom safety standards, equipment interlocks, and chemical handling requirements.Train and certify users on lithography tools and processes, ensuring safe and effective operation in a shared facility environment.Provide technical consultation to researchers on lithography strategy, design rules, and integration considerations.Collaboration and Integration Work closely with researchers, engineers and technicians to align tool performance with process requirements.Support downstream integration by ensuring lithography tools meet performance needs for etching, deposition, and lift-off processes.Participate in facility planning related to tool upgrades, replacements, and capability expansion.Collaborate with other process engineers, technicians, and researchers to support process transfer, yield improvement, and multi-step process integration.Participate in interdisciplinary projects involving lithography, metrology, etching, and deposition.